See what makes EO Technical Solutions the number one second source for ASML Parts, training, and service.
EO Technical provides fully customizable training courses for ASML scanner and stepper platforms.
REMA A rebuilds for a variety of platforms (/2X0,/3X0,4X0,/5X0,/7X0). Exchange service also available for emergency tool down orders.
R-Pin Refurbishment helps reduce down time and improves reticle handling capabilities for aging 5500 series equipment.
Electrical Mechanical Sub-Systems - Repair Philosophy & List of rebuilds
Rebuild of ASML Temperature Control Units include complete refurbishment and qualification on specially designed test rig. Please click on link for more details.
The P-Unit is a critical component of the WPS, refurbishment maximizes longevity and performance.
Rebuilding and Testing Procedures associated with the full repair of the dipod. Includes a detailed list of the tests used for qualification. Please click on link for details.
Detailed Qualification concerning the rebuild of the SiSiC and Zerodur E-Chuck. Please click on link for more details.
Save More on New & Refurbished E-Chuck Wafertables.
Cleaning and polishing of optical fibers entering or exiting the FCP are returned to original condition or better. Please click on link for more details.
Detailed qualification regarding the Shutter Unit UV Module. Outlines the rebuilding and testing process used to repair the unit.Please click on link for more details.
Rebuild and full qualification of Edge Sensor units used on the ASML 5500 Platform. Please click on link for more details.
Upgrade of Air Control Unit (ACU) frequency drive units due to failure over time. Please click on link for more details.
Datasheet which details the unique combination of testing and qualification which has resulted in less than 3% DOA for our in-house electronics repair shop. Please click on link for more details.
Informational datasheet which describes our ever widening selection of available inventory. Please click on link for more details.