EOTS Overview


See what makes EO Technical Solutions the number one second source for ASML Parts, training, and service.
EOTS Overview

Training Courses


EO Technical provides fully customizable training courses for ASML scanner and stepper platforms.
Training Courses

REMA A /2X0,/3X0,4X0,/5X0,/7X0


REMA A rebuilds for a variety of platforms (/2X0,/3X0,4X0,/5X0,/7X0). Exchange service also available for emergency tool down orders.
REMA A /2X0,/3X0,4X0,/5X0,/7X0

R-Pin - SERV.502.28708


R-Pin Refurbishment helps reduce down time and improves reticle handling capabilities for aging 5500 series equipment.
R-Pin - SERV.502.28708

Robot Rebuilds


Electrical Mechanical Sub-Systems - Repair Philosophy & List of rebuilds
Robot Rebuilds

ASML 1000W and 2500W TCU Rebuild


Rebuild of ASML Temperature Control Units include complete refurbishment and qualification on specially designed test rig. Please click on link for more details.
ASML 1000W and 2500W TCU Rebuild

P-Unit Actuator (SERV.436.15557)


The P-Unit is a critical component of the WPS, refurbishment maximizes longevity and performance.
P-Unit Actuator (SERV.436.15557)

Dipod Hall Assembly


Rebuilding and Testing Procedures associated with the full repair of the dipod. Includes a detailed list of the tests used for qualification. Please click on link for details.
Dipod Hall Assembly

E-Chuck (Detailed)


Detailed Qualification concerning the rebuild of the SiSiC and Zerodur E-Chuck. Please click on link for more details.
E-Chuck (Detailed)

E-Chuck Wafertables (overview)


Save More on New & Refurbished E-Chuck Wafertables.
E-Chuck Wafertables (overview)

Off-Axis Fiber Repair


Cleaning and polishing of optical fibers entering or exiting the FCP are returned to original condition or better. Please click on link for more details.
Off-Axis Fiber Repair

Shutter Unit UV Module (PAS400E)


Detailed qualification regarding the Shutter Unit UV Module. Outlines the rebuilding and testing process used to repair the unit.Please click on link for more details.
Shutter Unit UV Module (PAS400E)

ASML PAS5500 Edge Sensors


Rebuild and full qualification of Edge Sensor units used on the ASML 5500 Platform. Please click on link for more details.
ASML PAS5500 Edge Sensors

Air Fan Controller Rebuild for ACC/ACU


Upgrade of Air Control Unit (ACU) frequency drive units due to failure over time. Please click on link for more details.
Air Fan Controller Rebuild for ACC/ACU

EO Technical Solutions Testing Facility


Datasheet which details the unique combination of testing and qualification which has resulted in less than 3% DOA for our in-house electronics repair shop. Please click on link for more details.
EO Technical Solutions Testing Facility

EOTS Parts and Inventory


Informational datasheet which describes our ever widening selection of available inventory. Please click on link for more details.
EOTS Parts and Inventory