EO Technical Equipment Inventory
| More Info. | OEM | Model | Config | Serial # | ATP Document | Remarks |
|---|---|---|---|---|---|---|
| Make Request | ASML | a 2500/40 | 51001 | Tool stored in EOTS warehouse. | ||
| Make Request | ASML | a 5000/50 | 7911 | Tool stored in EOTS warehouse. | ||
| Make Request | ASML | a 5000/55 | 4111 |  | Currently being requalified in EOTS lab. Some ATP data available from 2019 Deinstall. | |
| Make Request | ASML | e 5500/80B | RMS | 5625 | Currently being requalified in EOTS lab. | |
| Make Request | ASML | f 5500/80B | RMS | 5082 | Tool stored in Portland OR. | |
| Make Request | ASML | h 5500/80B | RMS | 7069 | Currently being requalified in EOTS lab. |