EO Technical Equipment Inventory
| More Info. | OEM | Model | Config | Serial # | ATP Document | Remarks |
|---|---|---|---|---|---|---|
| Make Request | ASML | a 5000/50 | 7911 | Tool Stored in Portland OR | ||
| Make Request | ASML | a 5000/55 | 4111 |  | Tool stored in Portland OR | |
| Make Request | ASML | d 5500/60 | RMS | 5254001 | Tool being qualified in EOTS lab. | |
| Make Request | ASML | e 5500/80B | RMS | 5625 | Tool Stored in Portland OR | |
| Make Request | ASML | f 5500/80B | RMS | 5082 | Tool Stored in Portland OR | |
| Make Request | ASML | h 5500/80B | RMS | 7069 | Tool Stored in Portland OR |