EO Technical Solutions

Bringing the best in ASML parts, equipment and service to our customers.


We offer basic to advanced hands on training.


PM’s, Repairs, Installs, De-installs and More.


We Buy and Sell ASML Equipment.


We Repair, Exchange and Sell ASML parts.

EO Technical Solutions is the Semiconductor Industry’s #1 Second Source for ASML parts repair and rebuild services. With over 80 years of combined lithography equipment and engineering experience on both the supplier side and in the fabs, no one is more trusted than our team at EO Technical Solutions for your lithography needs. See our parts inventory at https://eotechnical.com/shop

EOTS Main Office, USA

EO Technical Solutions, LLC

11304 NE 66th St
Suite 102
Vancouver, WA 98662; USA

Contact Info: (General Sales Inquiries)

Phone: 360-828-7630

Email: litho@eotechnical.com

Press Inquiries: media@eotechnical.com

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