EOTS is the leader in second source parts for the ASML PAS5500, PAS5000, & PAS2500 Series equipment. The three transaction types that we offer are Repair, Exchange, and Sale. EOTS is primarily a repair / rebuild center that focuses heavily on comprehensive rebuild solutions. Our exclusive ability to test rebuilt parts in PAS5500 steppers & scannners provides additional assurances to Semiconductor Fabs with tight QC standards and high uptime expectations. Repairs average 3-4 weeks for diagnostics, repairs, bench tests, and final tool qualification.

Can’t wait for a repair? EOTS has developed a core exchange program for customers who are tool down.With nearly 30% of our orders being NFO or Counter-to-Counter, we’ve stocked 8000 parts to provide same day shipments for both domestic and international customers.

The third transaction type is a “sale”, this means a core exchange is not required. Some PAS5500 parts such as lasers, motors, bearings, cables do not require an exchange as we supply them new.  Many PAS2500 & PAS5000 parts do not require a core exchange because of the recent purchase of new OEM-stock from Boston semiconductor. If you need a part that doesn’t fall into those categories and a core exchange isn’t possible, we can often sell a part outright. In most the cases the price is 10-20% more than the standard repair / exchange.

We also buy ASML Parts. Contact Us for more information.

Click here to view and request parts from our OEM Spares department.

EOTS Main Office, USA

EO Technical Solutions
2501 SE Columbia Way
Suite 150
Vancouver, WA 98661; USA

Call + Fax

Phone: 360.828.7630
Fax: 360.828.1867

Press Inquiries:

East Coast Sales

Contact: Bill Jones
Phone: 207.420.4933

Universities / Govt Sales 

Contact: Joe Consolini
Phone: 744.655.7497

European Sales

Contact: Jim Doran
Phone: +44 780.196.5211

Singapore Sales

Contact: Yaw Yan Yee
Phone: +65 9691.7207